| 摘要 |
PURPOSE:To regulate temperature distribution of a melt near interface between solid and liquid, level the interfacial shape and grow a high-quality single crystal without crystal defects, by dipping a molded article made of a specific heating element in a crucible containing a raw material melt and liquid encapsulating agent and pulling up a crystal. CONSTITUTION:A raw material melt 2 and a liquid encapsulating agent 3, (e.g. B2O3) are placed in a crucible 4 supported in a rotatable and liftable manner through the lower shaft 6 and a cylindrical molded article 9, having a heating means, supported by electrodes 10 for molded article heater at the upper both ends and formed from a heating element, such as carbon coated with PBN on the surface thereof, so as to provide a wide and thick upper part, narrow and thin lower part and a small opening part at the tip thereof is placed to be dipped in the raw material melt 2. Respective temperatures are detected by temperature sensors 11 provided at the bottom of the crucible 4, heater 7 and back side of the molded article 9 and a current is passed through the above-mentioned molded article 9 to generate heat and regulate temperature distribution of melts 2 and 3 near the interface between solid and liquid. A seed crystal attached to the lower end of a rotatable and liftable pulling up shaft 5 is then dipped in the raw material melt 2 melted by the heater 7 and a single crystal 1 for pulling up is pulled up and grown through the seed crystal.
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