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发明名称
ELECTRON-BEAM LITHOGRAPHIC APPARATUS
摘要
申请公布号
EP0064639(B1)
申请公布日期
1988.09.07
申请号
EP19820103414
申请日期
1982.04.22
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
KOYAMA, KIYOMI
分类号
H01L21/027;H01J37/302;H01L21/30;(IPC1-7):H01J37/302
主分类号
H01L21/027
代理机构
代理人
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