| 摘要 |
PURPOSE:To permit correct reflection of the concn. of a sample spot by detecting the sample spot while measuring the inclination of a lane changing according to a developing direction on a sample plate. CONSTITUTION:The luminous flux movement in an X direction of zigzag scanning is divided to plural steps. An X-direction scanning data memory 4 stores the data on the photometric values of respective steps and a 1st threshold value memory 5 stores a 1st threshold value, respectively. An X-direction deviation calculating means 6 calculates the deviation of the sample spot from the data of the memory 4. An integrating means 8 integrates the data of the memory 4 and the 2nd threshold memory 10 stores the 2nd threshold value. A sample spot deciding means 12 compares the integrated value of the means 8 and the threshold value of the memory 10 and decides whether the measurement position is within a sample spot or not. A sample spot position memory 14 stores the position of the sample spot. A driving means 15 corrects the scanning range so as to eliminate the deviation in the sample spot within the sample spot and executes diagonal scanning at the gradient formed by the sample spot of the memory 14 in the range of the sample spot. |
