Handling tube made from silica glass (transparent quartz)

摘要

The invention relates to a handling tube made from silica glass for handling semiconductor wafers, having a tube seal which has a sealing plate, which bears against the handling tube at the end face and has a plane supporting surface, and a stopper made from silica glass and projecting into the handling tube. In order to configure such a handling tube in a way so that the opening is tightly sealed in a simple way, the interior of the handling tube simultaneously being adequately insulated with respect to the opening, the external cross-section of the stopper and the internal cross-section of the handling tube are adapted to one another, the stopper contains a filling made from a heat-insulating material, and the sealing plate has a continuous opening through which an extension of the stopper projects. The sealing plate is secured, in a manner such that it is capable of tilting slightly on the extension, by at least two stop parts bearing against the side of the sealing plate averted from the stopper, and the centroid of the tube seal is situated above the supporting surface of the stopper on the floor of the handling tube.