| 摘要 |
PURPOSE:To eliminate the peeling of electrodes, etc., by providing a thin film type vibration generator due to sputtering or the like on a vibrator surface, and providing electrodes formed by an ion implanting method on the vibrator surface. CONSTITUTION:An ultrasonic motor is composed of a ceramic elastic ring 1 for forming a vibrator, a piezoelectric element 2, a rotor 3 as an output mem ber, and a rotary shaft 4. In this case, a first electrode 5 is formed by an ion implanting method on the surface layer of the ring 1 contacting the element 2, and a second electrode 6 is similarly formed on the surface (which is not contacted with the ring 1) of the element 2. Thus, since the electrodes 5, 6 are formed on the surface layers of the element 2 and ring 1, the possibility of peelng the electrodes 5, 6 off from the ring and the element 2 can be entirely eliminated. |
