METHOD FOR MAKING AN EPOXY RESIN MOLD FROM A LITHOGRAPHY PATTERNED MICROSTRUCTURE MASTER

摘要

A method for pattern transfer to a silicone-based microstructure device comprises the steps of molding a silicone-based negative replica from a lithography patterned master mold. An epoxy resin-based master mold is molded from the silicone-based replica. A surface of the epoxy resin-based master mold is coated with a layer of Cr and then with a layer of Au on the CR layer to facilitate demolding of a silicone-based material. The silicone-based microstructure device is then molded from the coated epoxy resin-based master mold, wherein the silicone-based microstructure device has a dimensional pattern that substantially corresponds to the dimensional pattern of the lithography patterned master mold.