摘要 |
<p>PURPOSE:To enable the formation of a transparent conductive film having an extremely long pot life with good repeatability by combining alkoxide containing the chlorine of the specific composition. CONSTITUTION:Indium alkoxide containing chlorine expressed by the formular In(OR)xC13-x wherein R shows an alkyl or alkoxyalkyl group having 1 to 10 carbon atoms and the value of x is within a range of 1.0 to 2.5, and tin alkoxide containing chlorine expressed by the formula Sn(OR)yC1n-y wherein R shows an alkyl or alkoxyalkyl group, the value of n is 2 or 4 and if n=2, 1.0<=y<=1.8, and if n=4, 2.5<=y<=3.5, are mixed to the mole ratio of In/Sn within a range of 98/2<=In/Sn<=70/30. The alkyl group to be used has 1 to 10 carbon atoms, but the number of the carbon atoms is preferably 2 to 5. As a result, a thin film having a long pot life over a wide range of composition and good conductive characteristics is available with good repeatability.</p> |