| 摘要 |
<p>PURPOSE:To uniformly obtain a thickness in a stamper enabled to perform surface polishing of its reverse in a true plane condition being left as closely attached to a glass board by forming a groove, for containing a center holding washer part of the stamper, in a polishing pad surface. CONSTITUTION:In a condition that a glass board-provided stamper 23 is mounted to a supporting unit by a central washer 24, driving a motor rotating a polishing pad 21 in a direction of arrow head through a shaft 26, the glass board-provided stamper 23 is polished in its reverse by a surface of the polishing pad 21. Here the polishing pad 21 forms on its surface a ring-shaped groove 22 having sufficient width and depth for the central washer 24 just to be placed fitting and housed. As the result, the stamper 23 can be polished in its reverse by the polishing pad 21 with the stamper left as closely attached to a glass board, and the stamper enables its thickness to be uniformly obtained.</p> |
