发明名称 HALBLEITERVORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG DERSELBEN
摘要 <p>The present invention relates to a semiconductor device which exposes a P-N junction portion in mesa groove to attain high reverse voltage blocking ability and a method of manufacturing the same. The mesa groove is provided in the form of a ring, and a section thereof is finished in positive bevel configuration being increased in width from a major surface toward an inner portion. Thus, a surface electric field of the mesa groove is weakened to attain high reverse voltage blocking ability, while the mesa groove of positive beveled structure can be accurately formed by employing a drill provided with a cutting edge having a mesa type sectional configuration.</p>
申请公布号 DE3738873(A1) 申请公布日期 1989.05.24
申请号 DE19873738873 申请日期 1987.11.16
申请人 MITSUBISHI DENKI K.K. 发明人 SADAMORI,MASAAKI
分类号 H01L21/304;H01L29/06 主分类号 H01L21/304
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