| 摘要 |
PURPOSE:To efficiently input X rays into an X-ray conduit and to radiate a minute X-ray beam having high luminance and high parallelism to a minute part of a sample by installing an incident end of the X-ray conduit in the vicinity of an X-ray source target and installing the end part of an emitting side in the vicinity of the sample. CONSTITUTION:A glass capillary of 100mum the inside diameter of an incident end, 3mum the inside diameter of an emitting end and 60cm length is used as an X-ray conduit 2 for leading an X-ray flux to a sample from an X-ray source 1, an opening end is attached at a distance separated by about 1cm from an X-ray target focus, the other end is installed at a distance separated by about 1cm from a sample base 4 which is attached onto a goniometer 3, the X-ray source, the X-ray conduit and a sample chamber 5 are connected, and their inside is set to a vacuum state. Diffracted X rays and fluorescent X rays are detected by a large area Li dope Si semiconductor detector 6. The sample base 4 and the detector 6 are coaxial and can rotate independently each other and as for the sample moving use goniometer 3, an inclination of vertical coordinate system XYZ axes and the sample base and an in-plane rotation of the sample can be executed. |
