| 摘要 |
PURPOSE:To implement a pulse gas laser which can be operated in high repetition and has high efficiency by forming a gap between a spare ionization side electrode and a dielectric member, and constructing to also supply laser gas to the gap. CONSTITUTION:A gap 5 is formed between a dielectric 1 formed on a trigger electrode 2 and a spare ionization side electrode 3 having many holes for passing ultraviolet rays. Thus, since laser gas flows to the gap 5, ionized laser gas or impurities are scarcely stayed, and a decrease in the potential difference between the electrode 3 and the dielectric 1 is reduced. Accordingly, even if it is operated in high repetition, the intensity of the ultraviolet ray generated by a corona discharge on the dielectric 1 is scarcely decreased, the instability of laser excitation due to the decrease in the ionization of the laser gas in the discharge space can be suppressed, thereby improving its efficiency. |
