| 摘要 |
<p>PURPOSE:To completely prevent the gas flow phenomenum of a pressure regulator by heating the gas supplied via a pressure regulator before the gas enters the pressure regulator. CONSTITUTION:A heating mechanism 11 is provided to the gas piping 10 connecting between a gas bomb 1 and a pressure regulator 2, and the gas before entering the regulator 2 is heated. This enables the complete prevention of a gas flow phenomenum in the regulator 2 since the gas temperature at the exit of the regulator 2 can be constantly maintained at the nearly same temperature as that of the supply gas from the bomb 1, and the solidification of impurities by temperature lowering in the regulator 2 can be prevented.</p> |
