摘要 |
PURPOSE:To achieve improvement of durability of a heating part by a method wherein a heat energy acting part has a heating resistor layer, a pair of electrodes, and a protective layer, and said protective layer contains SiOx. CONSTITUTION:A heat energy acting part has a heating resistor layer 12, at least a pair of electrodes 13, 14 connected electrically to said heating resistor layer 12, and a protective layer 15, which is set up on the heating resistor layer 12 not to bring the heating resistor layer 12 into contact with recording liquid, and the protective layer contains SiOx, where x is within a range of 1.9<=x<=2.0. A heating element of an ink jet head for bubble jet is thus protected from ink and heat cycle, and its life time can be improved. |