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发明名称
WASHING METHOD OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH0210832(A)
申请公布日期
1990.01.16
申请号
JP19880161753
申请日期
1988.06.29
申请人
MATSUSHITA ELECTRON CORP
发明人
NAKAGAWA SATOSHI
分类号
B08B3/08;H01L21/304
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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