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发明名称
Spin coating apparatus
摘要
申请公布号
US4899688(A)
申请公布日期
1990.02.13
申请号
US19880271151
申请日期
1988.11.14
申请人
E. I. DU PONT DE NEMOURS AND COMPANY
发明人
HECKROTTE, ROBERT S.
分类号
C03C25/10;B05C3/12;B29B15/12;C03C25/12;C03C25/18
主分类号
C03C25/10
代理机构
代理人
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