发明名称 GALLIUM ARSENIDE CRYSTAL GROWN ON SILICON SUBSTRATE AND METHOD OF GROWING SUCH CRYSTAL
摘要 <p>A GaAs growth crystal comprises a Si substrate, an intermediate layer formed on the substrate and a GaAs layer grown on the intermediate layer. The intermediate layer includes constituent GaP/GaAsP and GaAsP/GaAs superlattice layers and additionally AIP and AlGaP thin films.</p>
申请公布号 CA1265980(A) 申请公布日期 1990.02.20
申请号 CA19850491985 申请日期 1985.10.01
申请人 DAIDOTOKUSHUKO KABUSHIKIKAISHA;UMENO, MASAYOSHI 发明人 UMENO, MASAYOSHI;SAKAI, SHIRO;SOGA, TETSUO
分类号 C30B29/40;C30B29/42;H01L21/18;H01L21/205;H01L29/267;(IPC1-7):C30B25/02 主分类号 C30B29/40
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