发明名称 NONVOLATILE SEMICONDUCTOR MEMORY
摘要 <p>PURPOSE:To prevent the occurrence of a leak current by using the exchange of electrons caused by the tunnel effect between a substrate and a charge storing layer for both data writing and data erasing. CONSTITUTION:A floating gate 3 is formed through a first gate insulating film composed of a thermal oxide film on a substrate 1, and a control gate 4 is formed through a second gate insulating film composed of the thermal oxide film on the floating gate 3. The floating gate 3 is extended until the gate 3 comes over an element separating area, and because of this, the coupled capacity between the floating gate 3 and the control gate 4 can be set larger than the coupled capacity between the floating gate 3 and the substrate 1, and the data can be written and erased only by the exchange of the electrons caused by the tunnel effect between the floating gate 3 and the substrate 1. Thus, the occurrence of the leak current can be prevented.</p>
申请公布号 JPH0264995(A) 申请公布日期 1990.03.05
申请号 JP19880204670 申请日期 1988.08.19
申请人 TOSHIBA CORP 发明人 MOMOTOMI MASAKI;TOIDA KOICHI;ITO YASUO;IWATA YOSHIHISA;MASUOKA FUJIO;CHIBA MASAHIKO;ENDO TETSUO;SHIRATA RIICHIRO;KIRISAWA RYOHEI
分类号 G11C17/00;G11C16/02;G11C16/04;G11C16/06;G11C16/08;G11C16/30;H01L27/115 主分类号 G11C17/00
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