| 摘要 |
PURPOSE:To eliminate the need of repairing a vacuum device main body when edges are destroyed by keeping the edges of the vacuum device main body in a protected state and enabling a flange to attach/detach by another edges in ordinary operation. CONSTITUTION:In the flange of the vacuum device in which conflat flanges are used, an intermediate flange 3 is put between the flange 1 of main body side and a flange 2 to be fixed, and the flange 2 is allowed to be attached/ detached without releasing the cramp between the flange 1 and the flange 3. Namely, the edge of the main body is always protected, and the attaching/ detaching of flange is ordinarily carried out by using another edge, so that the edge of the main body is prevented from damage and the need of repairing the main body is eliminated. |
