发明名称 |
MICROWAVE ENERGY DRIVING TYPE ELECTRODELESS LAMP |
摘要 |
PURPOSE: To prevent emission of microwaves out of a microwave energy-driven electrodeless lamp by checking the supply of microwaves into its microwave cavity upon detection of gas flowing through a gas leakage passage due to gas pressure in its gas manifold. CONSTITUTION: A manifold 27 is provided with a gas leakage passage 53 and communicates with a gas conduit 41 extending therefrom to a pressure switch 43. If gas flows through the passage 53, a corresponding drop in gas pressure inside the manifold 27 actuates the pressure switch 43 to halt the operation of a microwave generator 1 and thus check the supply of microwaves into a microwave cavity 7. That process prevents emission of microwaves out of the electrodeless lamp. |
申请公布号 |
JPH0272554(A) |
申请公布日期 |
1990.03.12 |
申请号 |
JP19890127994 |
申请日期 |
1989.05.23 |
申请人 |
FUSION SYST CORP |
发明人 |
ROBAATO EMU AABIN;JIYOSEFU PERETSUTO |
分类号 |
H01J61/52;H01J65/04;H05B41/24 |
主分类号 |
H01J61/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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