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发明名称
LASER SPUTTERING DEVICE
摘要
申请公布号
JPH02209479(A)
申请公布日期
1990.08.20
申请号
JP19890031791
申请日期
1989.02.10
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YOSHIDA ZENICHI;TANAKA KUNIO;NISHIKAWA YUKIO
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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