SOI THIN FILM FORMING METHOD,申请号JP19890031512-传众专利搜索

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发明名称	SOI THIN FILM FORMING METHOD
摘要
申请公布号	JPH02210818(A)	申请公布日期	1990.08.22
申请号	JP19890031512	申请日期	1989.02.10
申请人	NEC CORP	发明人	NAMITA HIROMITSU
分类号	H01L21/20;H01L21/263;H01L29/78;H01L29/786	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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