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发明名称
EPITAXY METHOD
摘要
申请公布号
JPH02248035(A)
申请公布日期
1990.10.03
申请号
JP19890067652
申请日期
1989.03.22
申请人
NEC CORP
发明人
SUGAO SHIGEO
分类号
H01L21/205;H01L21/203
主分类号
H01L21/205
代理机构
代理人
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地址
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