HIGH-VELOCITY ATOMIC BEAM SOURCE DEVICE,申请号JP19890074022-传众专利搜索

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发明名称	HIGH-VELOCITY ATOMIC BEAM SOURCE DEVICE
摘要
申请公布号	JPH02254157(A)	申请公布日期	1990.10.12
申请号	JP19890074022	申请日期	1989.03.28
申请人	COPAL ELECTRON CO LTD;NIPPON TELEGR & TELEPH CORP <NTT>	发明人	KAWAMURA HIROSHI;NUMAJIRI HIROO;UCHIDA TOSHIYA;HORIKAWA HIROSHI;SHIMOKAWA FUSAO;NAGAI KAZUTOSHI
分类号	C23C14/22;C23C14/24;C23C14/46;H05H3/02	主分类号	C23C14/22
代理机构		代理人
主权项
地址

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