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发明名称
TRAY STOCKER
摘要
申请公布号
JPH02263452(A)
申请公布日期
1990.10.26
申请号
JP19890004512
申请日期
1989.01.11
申请人
TOKYO ELECTRON LTD
发明人
KITAMURA YOSHISUKE
分类号
B65G1/07;B65G1/00;B65G1/06;H01L21/66;(IPC1-7):H01L21/66
主分类号
B65G1/07
代理机构
代理人
主权项
地址
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