ION-OPTICAL SYSTEM OF PLASMA ION SOURCE,申请号SU19874283010-传众专利搜索

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发明名称	ION-OPTICAL SYSTEM OF PLASMA ION SOURCE
摘要
申请公布号	SU1496614(A1)	申请公布日期	1990.11.23
申请号	SU19874283010	申请日期	1987.06.25
申请人	MO INZHENERNO-FIZICHESKIJ INSTITUT	发明人	GLAZKOV A.A.,SU;LOBANOV N.R.,SU
分类号	H05H7/00;H01J3/04	主分类号	H05H7/00
代理机构		代理人
主权项
地址

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