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发明名称
VERFAHREN UND VORRICHTUNG ZUR DURCHFUEHRUNG EINER VAKUUMBEHANDLUNG
摘要
申请公布号
DE4023511(A1)
申请公布日期
1991.01.31
申请号
DE19904023511
申请日期
1990.07.24
申请人
TDK CORP., TOKIO/TOKYO, JP
发明人
MOROOKA, HISAO, TOKIO/TOKYO, JP
分类号
C23C16/517;H01J37/32
主分类号
C23C16/517
代理机构
代理人
主权项
地址
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