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经营范围
发明名称
PLASMA STICKING DEVICE
摘要
申请公布号
JPH0328368(A)
申请公布日期
1991.02.06
申请号
JP19890160830
申请日期
1989.06.26
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
ONO TOSHIRO;MATSUO SEITARO
分类号
C23C14/34;H01L21/285;H01L21/31
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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