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发明名称
ETCHING METHOD FOR COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH0349225(A)
申请公布日期
1991.03.04
申请号
JP19890185012
申请日期
1989.07.18
申请人
FUJITSU LTD
发明人
OKAZAKI JIRO
分类号
H01L21/308
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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