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发明名称
FORMATION OF THIN FILM SUPERCONDUCTOR PATTERN
摘要
申请公布号
JPH03101177(A)
申请公布日期
1991.04.25
申请号
JP19890235628
申请日期
1989.09.13
申请人
SUMITOMO CEMENT CO LTD;RES DEV CORP OF JAPAN
发明人
SHIBUYA KYOICHI;HASHIGUCHI SHOICHI;NAGATA HIROTOSHI
分类号
H01L39/24;H01B12/06;H01B13/00
主分类号
H01L39/24
代理机构
代理人
主权项
地址
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