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发明名称
ION CURRENT SETTING METHOD
摘要
申请公布号
JPH03105838(A)
申请公布日期
1991.05.02
申请号
JP19890242476
申请日期
1989.09.19
申请人
FUJI ELECTRIC CO LTD
发明人
MIURA TSUKASA
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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