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发明名称
VERFAHREN ZUR VARIATION DER SEITENWANDNEIGUNG VON NEGATIVFOTORESISTSTRUKTUREN AUF A TIEF III B TIEF V-HALBLEITEROBERFLAECHEN
摘要
申请公布号
DD290296(A5)
申请公布日期
1991.05.23
申请号
DD19890334518
申请日期
1989.11.13
申请人
HUMBOLDT-UNIVERSTITAET ZU BERLIN,DE
发明人
BENDIG,JUERGEN,DD;BORNEMANN,INGE,DD;GRUETZNER,GABI,DD;HELM,SIEGRUN,DD;MISCHKE,HELGE,DD;SAUER,ERIKA,DD
分类号
H01L21/18;(IPC1-7):H01L21/18
主分类号
H01L21/18
代理机构
代理人
主权项
地址
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