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发明名称
DEVICE FOR MONITORING FILM FORMATION BY SPUTTERING
摘要
申请公布号
JPH03150358(A)
申请公布日期
1991.06.26
申请号
JP19890289481
申请日期
1989.11.07
申请人
SEIKO EPSON CORP
发明人
MINAMIMOMOSE ISAMU
分类号
C23C14/34;C23C14/54;H01L21/203
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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