发明名称 MANUFACTURE OF OXIDE CRYSTALLINE ORIENTED FILM AND OXIDE CRYSTALLINE ORIENTED FILM AND MAGNETOOPTICAL RECORDING MEDIUM
摘要 PURPOSE:To obtain a spinel type crystalline oriented film, a specific crystalline orientation of which is oriented, by irradiating a deposited film with ions during the deposition of an oxide having a spinel composition onto a substrate and heating a thin-film. CONSTITUTION:The spinel ferrite film 32 of a recording layer 32 is formed onto an amorphous substrate 31 such as glass through the irradiation of ions during deposition. In the composition formula AxB3-xOy of the film, A represents one kind of Mn, Co, Ni, Cu, Mg, Cr, Zn, Li and Ti and B represents Fe or Al and 0.5<=x<=2.0 and 2.5<=y<=4 hold. The film is formed in an oriented film having the metastable phase having the reflection peak intensity ratio of I111/I222<0.2 of crystal faces (111), (222). CoFe3O4 exhibits particularly large Kerr effect and Faraday effect, and the <111> oriented film is easy to obtain in a Co-rich composition region particularly, and 1<x<=1.5 is suitable. There is a possibility of the insufficient rectangular-shape of the magnetization curve of the recording layer 32 as a vertically magnetized film in such a photo-magnetic recording medium. A metallic film 33 having a thermal expansion coefficient larger than spinel ferrite constituting the recording layer 32 at that time. The metallic film 33 introduces compression pressure to the recording layer oriented in a <111> orientation, and the magnetization curve of the vertically magnetized film is formed in a rectangular-shape.
申请公布号 JPH03188604(A) 申请公布日期 1991.08.16
申请号 JP19900113201 申请日期 1990.04.27
申请人 TOSHIBA CORP 发明人 NAKAMURA SHIHO;HASHIMOTO SUSUMU;INOMATA KOICHIRO
分类号 C23C14/58;C23C14/08;C23C14/22;C23C14/46;C30B23/02;G11B11/10;G11B11/105;H01F10/20;H01F41/18 主分类号 C23C14/58
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