发明名称 OPTICAL TREATING DEVICE
摘要 PURPOSE:To improve the utilization efficiency of light by providing a mask with a light passage part and a light reflection part and a reflection means for reflecting the reflected light to this mask and treating an object to be treated by the light passing the light passage part. CONSTITUTION:The light passage part 12b having a prescribed shape and passing the light 1 from a light source and the reflection part 12c reflecting the light 1 are provided on the mask 12. A reflection means (spherical part) 13 is provided opposite to this reflection part 12c. The light reflected by the reflection means 13 at the reflection part 12c is reflected to the mask 12. A printed board 5 of an object to be treated is treated by the light passing through the light passage part 12b. In this way, the light which is absorbed, reflected, scattered and lost by the mask can be reduced.
申请公布号 JPH03210987(A) 申请公布日期 1991.09.13
申请号 JP19900114795 申请日期 1990.04.28
申请人 MITSUBISHI ELECTRIC CORP 发明人 ZUMOTO NOBUYUKI;YAGI TOSHINORI;NAI YASUTO;UCHIYAMA TOSHIE;TANAKA MASAAKI
分类号 B23K26/06;G03F7/20;H01L21/768 主分类号 B23K26/06
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