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发明名称
PATTERN FORMING METHOD AND COMPOSITION FOR PATTERN FORMATION TO BE USED THEREFOR
摘要
申请公布号
EP0161660(B1)
申请公布日期
1991.10.09
申请号
EP19850105876
申请日期
1985.05.13
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
IKARI, KUNIHIRO;NIKI, HIROKAZU;NAKASE, MAKOTO;SHINOZAKI, TOSHIAKI
分类号
G03F7/095
主分类号
G03F7/095
代理机构
代理人
主权项
地址
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