| 摘要 |
PURPOSE:To prevent air from flowing through by a structure wherein gas sealing part is made by arranging low concentration gas-containing gas blowing-off slots are provided on processing chamber side, inert sealing pressurized gas blowing-off slots are provided on the side more outward beyond said low concentration gas-containing gas blowing-off slots and suction slots are provided on the side further more outward beyond all the above- mentioned slots in parallel over the width direction of web above and beneath a web piercing part. CONSTITUTION:At a web piercing part, web 1 is supported by a supporting roller 4. Further, in a gap between the top surface of the web and an upper air sealing part and in a gap between the surface of the roller and a low air sealing part, inert gas such as nitrogen gas is blown off from the tips of blowing-off slots 5a and 5b, which are connected with inert pressurized gas source 8. Furthermore, gas supplied to a processing chamber, in which the generation of gas component is a little, is blown-off from low concentration gas-containing gas blowing-off slots 6a and 6b, which are connected with supplying gas source 9. And, to suction slots 7a and 7b, which are located on the side more outward 3 beyond the slots 5a and 5b, exhaust fans 10, which suck in the amount of gas blown off from the slots 5a and 5b and air from outside, are connected. By means of the above-mentioned structure, satisfactory sealing effect can be achieved regardless of the small space occupied by the gas sealing part. |
