发明名称 SUBSTRATE STORING DEVICE
摘要 <p>PURPOSE:To store and take out a substrate while maintaining the substrate stable by turnably installing a press turning member provided with a substrate pressing roller to a main body, connecting the main body with the press turning member by an elastic body and connecting a door and the press turning member by providing a long hole loosely fitting part. CONSTITUTION:A press turning member 10 receives tensile force from an extension coil spring 12 and a substrate pressing roller 11 presses the surface of a substrate 15. The press operation stabilizes the substrate being sandwiched between the substrate pressing roller 11 and a supporting pin 6 and the rocking of the substrate in a substrate storing container is prevented when loading the substrate storing container on an exposing device, etc., unloading it from the device and carrying it to the device. When the door 3 is opened at a certain fixed angle, a connecting member 13 interlocks with the movement of the door 3, however, only the relative positions of the projecting part 10a of the press turning member 10 and a long hole 13a change and the connecting member 13 does not apply force to the press turning member 10. The surface of the substrate 15 is still pressed by the substrate pressing roller 11 and the substrate is taken out without damage while being supported by a supporting roller 9 at the bottom.</p>
申请公布号 JPH03257845(A) 申请公布日期 1991.11.18
申请号 JP19900055326 申请日期 1990.03.07
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KUSUMOTO MASAHARU;NAGANO HIROYUKI
分类号 H01L21/673;H01L21/68 主分类号 H01L21/673
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