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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH03277788(A)
申请公布日期
1991.12.09
申请号
JP19900076593
申请日期
1990.03.28
申请人
TAIYO YUDEN CO LTD
发明人
OWADA TORU
分类号
C09K13/08;C23F4/00;H01L21/302;H01L21/3065
主分类号
C09K13/08
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代理人
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