EVAPORATING SOURCE,申请号JP19900084946-传众专利搜索

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发明名称	EVAPORATING SOURCE
摘要
申请公布号	JPH03285064(A)	申请公布日期	1991.12.16
申请号	JP19900084946	申请日期	1990.04.02
申请人	TOSHIBA CORP	发明人	YOSHIDA ATSUYA
分类号	C23C14/24	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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