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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04716(A)
申请公布日期
1992.01.06
申请号
JP19900100927
申请日期
1990.04.17
申请人
FUJITSU LTD
发明人
INOUE FUMIHIKO
分类号
H01L23/52;H01L21/265;H01L21/28;H01L21/3205;H01L21/336;H01L29/78;(IPC1-7):H01L21/28;H01L21/320;H01L29/784
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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