Micromechanical component including an integrated photodiode and a microprojector

摘要

A micromechanical component includes: at least one micromirror; and an integrated photodiode. The micromechanical component is part of a microprojector which further includes a light source. The integrated photodiode of the micromechanical component receives light from the light source.

主权项

1. A micromechanical component, comprising:
at least one micromirror; and an integrated photodiode, wherein the micromirror and the integrated photodiode are situated on a shared substrate, one mirror face of the micromirror is situated on a first substrate side and the photodiode is situated on the first substrate side in such a way that the micromirror and the photodiode are situated within a shared incidence area for incident light emitted by a light source as a combined beam formed of beams of a first laser and a second laser, such that the integrated photodiode is used as a shared detector for radiant power of both the first laser and the second laser.