| 摘要 |
PURPOSE:To prevent the receipt of 2 pieces of substrate steadily and contrive a speedy feeding and discharge of the same to and from a descending table by providing an outlet for substrate which has a slit permitting the passage of no more than one piece of substrate on the lower part of a feeding magazine part, fixing the substrate by adsorption and having a movable feeding table and registration base. CONSTITUTION:On the lower part thereof a feeding magazine part 14 is equipped with an outlet for substrate which has a slit permitting the passage of no more than one piece of substrate 23. A feeding table 15 is adjusted to the side of the feeding magazine part 14 and a substrate 23 is set thereon (initial position). To prevent the substrate from the dislocation, the substrate to be discharged 23 is securely fixed by an adsorbing opening 32 in the feeding side and the substrate to be received 23 by a suction opening 33 in the receiving side. The substrate 23 is discharged and moved to the processing position, while the processed substrate 23 is caused to slide into and be received by the lowermost part within the receiving magazine part 17, preceded by a synthetic resin plate 35. Thereafter, a registration base 16 is elevated to the height of processing, receiving the substrate 23 from the feeding table 15, adjusting its position, causing it to be sucked in a vacuum and simultaneously returning the feeding magazine part 14 and the receiving magazine part 17 to the initial position (by elevation). |
