FORMING METHOD FOR INSULATING FILM,申请号JP19900208508-传众专利搜索

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发明名称	FORMING METHOD FOR INSULATING FILM
摘要
申请公布号	JPH0499029(A)	申请公布日期	1992.03.31
申请号	JP19900208508	申请日期	1990.08.07
申请人	NEC CORP	发明人	SUZUKI MIEKO
分类号	H01L21/318	主分类号	H01L21/318
代理机构		代理人
主权项
地址

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