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发明名称
SPUTTERING METHOD
摘要
申请公布号
JPH04105316(A)
申请公布日期
1992.04.07
申请号
JP19900222871
申请日期
1990.08.24
申请人
TOKYO ELECTRON LTD
发明人
KOIZUMI KOJI
分类号
C23C14/34;H01L21/203;H01L21/285
主分类号
C23C14/34
代理机构
代理人
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地址
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