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发明名称
FILAMENT POWER SUPPLY FOR ION SOURCE
摘要
申请公布号
JPH04115442(A)
申请公布日期
1992.04.16
申请号
JP19900235298
申请日期
1990.09.05
申请人
NISSIN ELECTRIC CO LTD
发明人
SEKINE KOHEI
分类号
H01J27/08;H01J37/08
主分类号
H01J27/08
代理机构
代理人
主权项
地址
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