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发明名称
SUBSTRATHEIZEN MIT NIEDERVOLTBOGENENTLADUNG UND VARIABLEM MAGNETFELD
摘要
申请公布号
DE4035131(A1)
申请公布日期
1992.05.07
申请号
DE19904035131
申请日期
1990.11.05
申请人
BALZERS AG, BALZERS, LI
发明人
KAUFMANN, HELMUT, DR., TRIESEN, LI;SCHMID, ROLAND, DR., GOEFIS, AT
分类号
C23C14/30;C23C14/54;H01J37/32;H05B7/00;H05B7/18
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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