| 摘要 |
PURPOSE:To decide easily a conversion coefficient to a real coordinate system by making a close alignment of a face plate coordinate system and a sample unnecessary, and by merely setting up three windows on parallel lines. CONSTITUTION:A light figure of an object 1 is magnified and converted to a multivalued image to be stored in a memory, and the multivalued image informations containing half tones are displayed in a CRT. The intersection of the optical axis of a microscope and a stage is made X0, Y0 and conversion coefficients (a), (b) are found by calibration samples on the parallel lines of an interval L on the real coordinate, in converting coordinate values of a face plate coordinate system xy to a stage coordinate X, Y. The parallel lines are set about parallel to the X-axis, windows 51 to 53 are set up in the face plate 50, the 51 and 52 are set on the same line, the 53 on the other line and the x-coordinate values of the 52, 53 are set the same. The coordinate values of points E1 to E3 within the windows are found. The foot of a perpendicular from the point E3 to the straight line E1E2 is F1. E3-F1=L is obtained, the inclination with the Y-axis is alpha1, E2 the origin and the width L is found. Parallel lines are set about parallel to the Y-axis and the width L is found in the same way. Coefficients (a), (b) is found from both the equations. The values (a), (b) are stored and hereafter used in measurement. |
