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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH04188761(A)
申请公布日期
1992.07.07
申请号
JP19900317578
申请日期
1990.11.21
申请人
SEIKO EPSON CORP
发明人
FUKAYA NORIFUMI
分类号
G01R31/28;G01R31/3185;H01L21/66;H01L21/822;H01L27/04
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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