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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH04206932(A)
申请公布日期
1992.07.28
申请号
JP19900339347
申请日期
1990.11.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
MIYATAKE HIROSHI
分类号
H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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