发明名称 |
蒸着源アセンブリ、有機層蒸着装置及びそれを利用した有機発光表示装置の製造方法 |
摘要 |
A method of manufacturing an organic light-emitting display apparatus includes: disposing an organic layer deposition apparatus to be apart from a substrate by a set distance; and depositing deposition material on the substrate while the organic layer deposition apparatus or the substrate is moved relative to the other, the deposition source apparatus including: a deposition source including a first deposition source and a second deposition source stacked on the first deposition source; a deposition source nozzle unit including a second deposition source nozzle unit at a side of the second deposition source to face the substrate and including a plurality of second deposition source nozzles, and a first deposition source nozzle unit at the side of the second deposition source to face the substrate and including a plurality of first deposition source nozzles formed to pass through the second deposition source; and a patterning slit sheet smaller than the substrate. |
申请公布号 |
JP6034607(B2) |
申请公布日期 |
2016.11.30 |
申请号 |
JP20120159480 |
申请日期 |
2012.07.18 |
申请人 |
三星ディスプレイ株式會社Samsung Display Co.,Ltd. |
发明人 |
成 ▲うん▼ ▲てつ▼;金 茂 顯 |
分类号 |
C23C14/24;H01L51/50;H05B33/10 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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